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Cathodic Arc is a physical vapor deposition (PVD)
process which utilizes a centrally located cylindrical material source
called a target. The material source can consist of any electrically conductive
metal. The process involves striking a high current, low voltage electric
arc directly on the target material to produce an instantaneous ionization
of the metal. The degree of ionization is typically around 90%. These
metal ions are propelled at high energies (i.e.., 60-100 eV) into the
vacuum through either an inert or reactive gas and is subsequently deposited
onto the substrate of interest.
The type and volume of the gas utilized can dramatically
change the nature of a coating without changing the metallic material
source. For instance, Titanium nitride (TiN) is a hard, reddish-gold colored
coating with exceptional wear resistance and hardness. TiN has historically
been used in the tool industry as a wear resistant coating on high speed
steel. TiN is produced by introducing measured amounts of nitrogen into
the chamber during titanium deposition. This coating can be radically
changed simply by adding an additional gas, such as acetylene (C2H2),
during deposition to create a titanium carbonitride (TiCN). TICN, while
also being very hard, exhibits a dark gray to black color and has been
deposited to function as a non-reflective or decorative coating.
The uses and properties of the various coatings available
from Tanury Industries can, in many cases, be tailored to the individual
customers application. This custom process and coating design is standard
in the development of most PVD applications. Characteristics which can
be varied to create a significant change in material properties include
coating thickness, reactive gas component, base material, bias setting,
and deposition temperature among others. Once an approved process and
coating are achieved Tanury Industries strict quality control requirements
document each parameter for hard filing and input into a Programmable
Logic Controller to control the process in a highly reliable manner.
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